An emission microscope, which has two electrostatic lenses, has been made at our laboratory in order to observe magnified emission patterns for a FEA (field emission array). The electrostatic lens system consists of a bipotential lens and an Einzel lens (a three electrode static lens). The lenses focus the emission patterns on a phosphor screen placed at 315mm from the center plate of the Einzel lens. The total magnification is 100. The microscope enables to separate the field electron emission from each individual cathode as bright spots on the phosphor screen. It is found that the electron beam from slightly non-concentric structure of the individual cathode deviates from the optical axis and gives a comet-like tailed spot. The luminance of the spots fluctuates like pulses.
放射顕微鏡による電界放射陰極列からの放射電子線の観察
trieejE118_513_1998.pdf
(3.52MB)
