A levitated object above stator vibrators can be held by the acoustic viscous force generated by near-field acoustic levitation is phenomenon. The holding force yields at the edge of a vibration plate and nodes of a bending vibration mode, and it is in proportion to vibration amplitude of the vibration plate. This paper describes methods of transfer and positioning of a levitated object above many aligned stator vibrators, some experimental results and the proposition of the application as a non-contact-stepping ultrasonic motor (NCS-USM). A linear type and rotary one of a NCS-USM can be flexibly constructed. The NCS-USM has a possibility of high torque performance compared with an ordinary non-contact USM using traveling wave.
アレイ型ステータ振動子を用いた浮揚物体の移送制御（第1報）移送と位置決めの実験的検討
symjspe2011S_933_2011.pdf
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