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マイクロ波励起表面波プラズマ半導体処理装置の数値解析コードにおけるプラズマ電子密度分布の計算も含めた解析スキームの検討
http://hdl.handle.net/10258/1715
http://hdl.handle.net/10258/1715b6f37447-72f3-45ea-8829-c4656504c884
名前 / ファイル | ライセンス | アクション |
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jsaem19_348_2011.pdf (1.1 MB)
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Item type | 学術雑誌論文 / Journal Article.(1) | |||||||||||
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公開日 | 2012-11-01 | |||||||||||
タイトル | ||||||||||||
言語 | ja | |||||||||||
タイトル | マイクロ波励起表面波プラズマ半導体処理装置の数値解析コードにおけるプラズマ電子密度分布の計算も含めた解析スキームの検討 | |||||||||||
タイトル | ||||||||||||
言語 | en | |||||||||||
タイトル | Numerical Simulation Code for Microwave Excited Surface Wave Plasma Semi-conductor Process | |||||||||||
言語 | ||||||||||||
言語 | jpn | |||||||||||
キーワード | ||||||||||||
言語 | en | |||||||||||
主題Scheme | Other | |||||||||||
主題 | Plasma semi-conductor process | |||||||||||
キーワード | ||||||||||||
言語 | en | |||||||||||
主題Scheme | Other | |||||||||||
主題 | Surface wave plasma | |||||||||||
キーワード | ||||||||||||
言語 | en | |||||||||||
主題Scheme | Other | |||||||||||
主題 | FDTD simulation | |||||||||||
キーワード | ||||||||||||
言語 | en | |||||||||||
主題Scheme | Other | |||||||||||
主題 | Self-consistent analysis | |||||||||||
資源タイプ | ||||||||||||
資源タイプ識別子 | http://purl.org/coar/resource_type/c_6501 | |||||||||||
資源タイプ | journal article | |||||||||||
アクセス権 | ||||||||||||
アクセス権 | open access | |||||||||||
アクセス権URI | http://purl.org/coar/access_right/c_abf2 | |||||||||||
著者 |
畑口, 雅人
× 畑口, 雅人× 西川, 崇之× 川口, 秀樹
WEKO
4713
× 鏡, 愼 |
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室蘭工業大学研究者データベースへのリンク | ||||||||||||
川口 秀樹(KAWAGUCHI Hideki) | ||||||||||||
http://rdsoran.muroran-it.ac.jp/html/100000127_ja.html | ||||||||||||
室蘭工業大学研究者データベースへのリンク | ||||||||||||
鏡 愼(KAGAMI Shin) | ||||||||||||
http://rdsoran.muroran-it.ac.jp/html/100000070_ja.html | ||||||||||||
抄録 | ||||||||||||
内容記述タイプ | Abstract | |||||||||||
内容記述 | The microwave excited surface wave plasma process enables us to do less damage processing by active neutral gaseous and wide area processing. On the other hand, the surface wave plasma is strong coupling phenomena of microwave and plasma, and detail understanding of the phenomena by any pure analytical methods is not easy. Authors have been working in development of numerical simulation tool for this equipment by using FDTD method. So far the FDTD method with appropriate plasma macro model which is partially based on experimental data of electron density was proposed and good agreements with experimental results was obtained. As the next stage of the development of the numerical code, this paper presents estimation of electron density distribution in simulation. | |||||||||||
言語 | en | |||||||||||
書誌情報 |
ja : 日本AEM学会誌 巻 19, 号 2, p. 348-353, 発行日 2011-06-10 |
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出版者 | ||||||||||||
言語 | ja | |||||||||||
出版者 | 日本AEM学会 | |||||||||||
論文ID(NAID) | ||||||||||||
関連タイプ | isIdenticalTo | |||||||||||
識別子タイプ | NAID | |||||||||||
関連識別子 | 110008673752 | |||||||||||
日本十進分類法 | ||||||||||||
主題Scheme | NDC | |||||||||||
主題 | 547 | |||||||||||
ISSN | ||||||||||||
収録物識別子タイプ | PISSN | |||||||||||
収録物識別子 | 09194452 | |||||||||||
書誌レコードID | ||||||||||||
収録物識別子タイプ | NCID | |||||||||||
収録物識別子 | AN10457520 | |||||||||||
書誌レコードID | ||||||||||||
収録物識別子タイプ | NCID | |||||||||||
収録物識別子 | AA11512429 | |||||||||||
権利 | ||||||||||||
言語 | ja | |||||||||||
権利情報 | Copyright 2011 日本AEM学会 ダウンロードを含むこの著作物の利用は、著作権法の私的使用及び引用の範囲に限り認められます。その範囲外の利用については、日本AEM学会の承諾が必要です。 | |||||||||||
著者版フラグ | ||||||||||||
出版タイプ | VoR | |||||||||||
出版タイプResource | http://purl.org/coar/version/c_970fb48d4fbd8a85 | |||||||||||
フォーマット | ||||||||||||
内容記述タイプ | Other | |||||||||||
内容記述 | application/pdf |