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Anodic Oxidation of Narrow Region of Silicon Substrate
http://hdl.handle.net/10258/601
http://hdl.handle.net/10258/601b378ea4c-ce4c-4f25-8926-5022a5a91057
名前 / ファイル | ライセンス | アクション |
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kiyo44_rikou_pp15-31.pdf (1.5 MB)
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Item type | 紀要論文 / Departmental Bulletin Paper(1) | |||||
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公開日 | 2014-03-04 | |||||
タイトル | ||||||
言語 | en | |||||
タイトル | Anodic Oxidation of Narrow Region of Silicon Substrate | |||||
言語 | ||||||
言語 | eng | |||||
資源タイプ | ||||||
資源タイプ識別子 | http://purl.org/coar/resource_type/c_6501 | |||||
資源タイプ | departmental bulletin paper | |||||
アクセス権 | ||||||
アクセス権 | open access | |||||
アクセス権URI | http://purl.org/coar/access_right/c_abf2 | |||||
著者 |
野村, 滋
× 野村, 滋× 遠藤, 敏明× 福田, 永× MOSTAFA KAMAL, Abu Hena |
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抄録 | ||||||
内容記述タイプ | Abstract | |||||
内容記述 | Anodic oxide films were formed on comparatively small area of silicon substrates. Constant current mode of anodization has been used for oxidation,but during oxidation processes,the current density has been changed to go through one or more stepped transitions either step-up or step-down before the completion of the processes. This modified mode of constant current anodization showed to be effective in reducing the interface state density of a silicon/silicon-oxide system. Among the various stepped transitions in the modified mode of constant current anodization,step-down transition of current density was found to be optimum in reducing the interface-state density. The structure and composition of SiO₂/Si interface regions for both large-area oxide and narrow-area oxide were also investigated by X-ray photoelectron spectroscopy (XPS). The composition of SiO₂/Si interface of narrowarea oxide showed less stoichiometry than that of large-area oxide. | |||||
言語 | en | |||||
書誌情報 |
ja : 室蘭工業大学研究報告. 理工編 en : Memoirs of the Muroran Institute of Technology. Science and engineering 巻 44, p. 15-31, 発行日 1994-11-25 |
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出版者 | ||||||
言語 | ja | |||||
出版者 | 室蘭工業大学 | |||||
論文ID(NAID) | ||||||
関連タイプ | isIdenticalTo | |||||
識別子タイプ | NAID | |||||
関連識別子 | 110000351872 | |||||
日本十進分類法 | ||||||
主題Scheme | NDC | |||||
主題 | 549.8 | |||||
ISSN | ||||||
収録物識別子タイプ | PISSN | |||||
収録物識別子 | 05802415 | |||||
書誌レコードID | ||||||
収録物識別子タイプ | NCID | |||||
収録物識別子 | AN00238225 | |||||
著者版フラグ | ||||||
出版タイプ | VoR | |||||
出版タイプResource | http://purl.org/coar/version/c_970fb48d4fbd8a85 | |||||
フォーマット | ||||||
内容記述タイプ | Other | |||||
内容記述 | application/pdf |