@article{oai:muroran-it.repo.nii.ac.jp:00005599, author = {伊藤, 秀範 and ITOH, Hidenori and 池田, 誠 and IKEDA, Makoto and 武山, 保人 and TAKEYAMA, Yasuhito and 佐藤, 孝紀 and SATOH, Kohki and 中尾, 好隆 and NAKAO, Yoshitaka and 田頭, 博昭 and TAGASHIRA, Hiroaki}, issue = {3}, journal = {電気学会論文誌. C, 電子・情報・システム部門誌}, month = {}, note = {application/pdf, A computer-aided spectroscopic system by use of an image processing method has been developed in order to diagnose various processing plasma. This sytem is composed of a monochromator, two image intensifiers, a CCD camera and a computer. This is characterised by the employment of a digital signal processor and spatial filtering treatment of image data for fast image operations. The validity and the significance of this system have been confirmed by the results of the spatiotemporally resolved optical emission diagnostics of plasmas in H_2. The time-resolved spectra have been obtained clearly and the time variation of the profles has been explained from the viewpoint of the self-bias voltage in plasmas.}, pages = {475--480}, title = {画像処理法を用いたプラズマ分光診断法の開発と水素RFプラズマへの適用}, volume = {115}, year = {1995}, yomi = {イトウ, ヒデノリ and イケダ, マコト and タケヤマ, ヤスヒト and サトウ, コウキ and ナカオ, ヨシタカ and タガシラ, ヒロアキ} }