{"created":"2023-06-19T10:27:04.815764+00:00","id":5899,"links":{},"metadata":{"_buckets":{"deposit":"3c305e4f-d755-4f2c-8baa-1dbb270f90d9"},"_deposit":{"created_by":18,"id":"5899","owners":[18],"pid":{"revision_id":0,"type":"depid","value":"5899"},"status":"published"},"_oai":{"id":"oai:muroran-it.repo.nii.ac.jp:00005899","sets":["216:273","46"]},"author_link":["9587","45290","46071","9585","9586"],"item_79_biblio_info_10":{"attribute_name":"書誌情報","attribute_value_mlt":[{"bibliographicIssueDates":{"bibliographicIssueDate":"2001","bibliographicIssueDateType":"Issued"},"bibliographicIssueNumber":"5","bibliographicPageEnd":"470","bibliographicPageStart":"465","bibliographicVolumeNumber":"121","bibliographic_titles":[{"bibliographic_title":"電気学会論文誌. A, 基礎・材料・共通部門誌","bibliographic_titleLang":"ja"}]}]},"item_79_description_23":{"attribute_name":"フォーマット","attribute_value_mlt":[{"subitem_description":"application/pdf","subitem_description_type":"Other"}]},"item_79_description_7":{"attribute_name":"抄録","attribute_value_mlt":[{"subitem_description":"The characteristics of RF plasmas as a function of driving frequency f, 0.1-13.56MHz in nitrogen has been observed by optical emission spectroscopic method. The space- and time-resolved profiles of the net excitation rate of molecules and ions have been deduced from spatiotemporally resolved optical emission profiles of their species, i.e. the second positive and the first negative bands. It is found that ionizations due to the secondary electrons from the electrodes by positive ions play an important part in the maintaining mechanism at low frequency as f < 1.5MHz, while a discharge is maintained by bulk ionizations at high frequency as f > 10MHz. The results also show that a discharge at middle frequency as 1.5 < f < 10MHz, is explained from the point of view of the transition of the mechanism which maintains a discharge. It is also shown that the excitation profiles exhibit double layers near the electrodes in nitrogen at 13.56MHz, 60W and the gas pressure p, p > 67Pa.","subitem_description_language":"en","subitem_description_type":"Abstract"}]},"item_79_link_5":{"attribute_name":"室蘭工業大学研究者データベースへのリンク","attribute_value_mlt":[{"subitem_link_text":"佐藤 孝紀（SATOH Kohki）","subitem_link_url":"http://rdsoran.muroran-it.ac.jp/html/100000024_ja.html"}]},"item_79_publisher_11":{"attribute_name":"出版者","attribute_value_mlt":[{"subitem_publisher":"電気学会","subitem_publisher_language":"ja"}]},"item_79_relation_15":{"attribute_name":"論文ID（NAID）","attribute_value_mlt":[{"subitem_relation_type":"isIdenticalTo","subitem_relation_type_id":{"subitem_relation_type_id_text":"120004681109","subitem_relation_type_select":"NAID"}}]},"item_79_rights_19":{"attribute_name":"権利","attribute_value_mlt":[{"subitem_rights":"Copyright 2001 電気学会 ダウンロードを含むこの著作物の利用は、著作権法の私的使用及び引用の範囲に限り認められます。その範囲外の利用については、電気学会 の承諾が必要です。","subitem_rights_language":"ja"}]},"item_79_source_id_12":{"attribute_name":"ISSN","attribute_value_mlt":[{"subitem_source_identifier":"03854205","subitem_source_identifier_type":"PISSN"},{"subitem_source_identifier":"13475533","subitem_source_identifier_type":"EISSN"}]},"item_79_source_id_14":{"attribute_name":"書誌レコードID","attribute_value_mlt":[{"subitem_source_identifier":"AN10136312","subitem_source_identifier_type":"NCID"},{"subitem_source_identifier":"AA12116187","subitem_source_identifier_type":"NCID"}]},"item_79_subject_9":{"attribute_name":"日本十進分類法","attribute_value_mlt":[{"subitem_subject":"427","subitem_subject_scheme":"NDC"}]},"item_79_version_type_21":{"attribute_name":"著者版フラグ","attribute_value_mlt":[{"subitem_version_resource":"http://purl.org/coar/version/c_970fb48d4fbd8a85","subitem_version_type":"VoR"}]},"item_access_right":{"attribute_name":"アクセス権","attribute_value_mlt":[{"subitem_access_right":"open 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