@article{oai:muroran-it.repo.nii.ac.jp:00006010,
 author = {小崎, 元嗣 and KOZAKI, Mototsugu and 佐藤,  孝紀 and SATOH, Kohki and 伊達, 広行 and DATE, Hiroyuki and 伊藤,  秀範 and ITOH, Hidenori and 田頭,  博昭 and TAGASHIRA, Hiroaki},
 issue = {2},
 journal = {電気学会論文誌. A, 基礎・材料・共通部門誌},
 month = {},
 note = {application/pdf, An efficient self-consistent Particle-in-Cell/Monte Carlo (PIC/MC) simulator for rf plasma using higher order sampling technique called Legendre Polynomial Weighted Sampling (LPWS) has been developed in this work. The spatial distributions of charged particles in a discharge space obtained by LPWS show good statistics, as compared with the conventional PIC/MC performed with the same number of super particles. Also, the spatial distribution of electric field in the discharge space calculated from those of the charged particles by solving Poisson’s equation show good statistics, so that instability of simulation caused by the fluctuation of the electric field which readily occurs in a particle model simulation of high density plasma can be inhibited by the developed simulator. Calculation time of the PIC/MC simulator coupled with LPWS is almost the same as that of the conventional PIC/MC simulator. It is found that the results obtained by the developed PIC/MC simulation have a tendency to reach the steady state condition earlier than those by the conventional PIC/MC simulator.},
 pages = {145--150},
 title = {高次のサンプリング技法を用いた効果的PIC/MC simulatorの開発},
 volume = {122},
 year = {2002},
 yomi = {コザキ, モトツグ and サトウ, コウキ and ダテ, ヒロユキ and イトウ, ヒデノリ and タガシラ, ヒロアキ}
}