{"created":"2023-06-19T10:28:46.032353+00:00","id":8302,"links":{},"metadata":{"_buckets":{"deposit":"0645e6a4-15ce-4126-80d2-d359d76e6e03"},"_deposit":{"created_by":18,"id":"8302","owners":[18],"pid":{"revision_id":0,"type":"depid","value":"8302"},"status":"published"},"_oai":{"id":"oai:muroran-it.repo.nii.ac.jp:00008302","sets":["216:273","35:173"]},"author_link":["9587","9585","9586"],"item_77_biblio_info_10":{"attribute_name":"書誌情報","attribute_value_mlt":[{"bibliographicIssueDates":{"bibliographicIssueDate":"1999-11-30","bibliographicIssueDateType":"Issued"},"bibliographicPageEnd":"92","bibliographicPageStart":"87","bibliographicVolumeNumber":"49","bibliographic_titles":[{"bibliographic_title":"室蘭工業大学紀要","bibliographic_titleLang":"ja"},{"bibliographic_title":"Memoirs of the Muroran Institute of Technology","bibliographic_titleLang":"en"}]}]},"item_77_description_23":{"attribute_name":"フォーマット","attribute_value_mlt":[{"subitem_description":"application/pdf","subitem_description_type":"Other"}]},"item_77_description_7":{"attribute_name":"抄録","attribute_value_mlt":[{"subitem_description":"Behavior of electrons and N2+ ions in radio frequency(RF) discharge in nitrogen is simulated by self-consistent model using Propagator method coupled with Poisson's equation and external circuit equations. The spatio-temporal variations of electric field in a gap, mean energies of the electrons and ions, excitation rate etc, are obtained. It is seen that in the spatio-temporal variation of excitation rate to C3.PI.u state, large peaks due to sheath appear at the phase of maximum voltage of RF power, and small peaks next to the large peaks appear at the same phase. This profile agrees qualitatively with the density profile of C3.PI.u state molecules obtained from emission spectroscopy. It is found from this simulation that the small peaks are due to double layers.","subitem_description_language":"en","subitem_description_type":"Abstract"}]},"item_77_description_8":{"attribute_name":"注記","attribute_value_mlt":[{"subitem_description":"投稿論文","subitem_description_language":"ja","subitem_description_type":"Other"}]},"item_77_link_5":{"attribute_name":"室蘭工業大学研究者データベースへのリンク","attribute_value_mlt":[{"subitem_link_text":"佐藤 孝紀（SATOH Kohki）","subitem_link_url":"http://rdsoran.muroran-it.ac.jp/html/100000024_ja.html"}]},"item_77_publisher_11":{"attribute_name":"出版者","attribute_value_mlt":[{"subitem_publisher":"室蘭工業大学","subitem_publisher_language":"ja"}]},"item_77_relation_15":{"attribute_name":"論文ID（NAID）","attribute_value_mlt":[{"subitem_relation_type":"isIdenticalTo","subitem_relation_type_id":{"subitem_relation_type_id_text":"110000076530","subitem_relation_type_select":"NAID"}}]},"item_77_rights_19":{"attribute_name":"権利","attribute_value_mlt":[{"subitem_rights":"© 1999 室蘭工業大学","subitem_rights_language":"ja"}]},"item_77_source_id_12":{"attribute_name":"ISSN","attribute_value_mlt":[{"subitem_source_identifier":"13442708","subitem_source_identifier_type":"PISSN"}]},"item_77_source_id_14":{"attribute_name":"書誌レコードID","attribute_value_mlt":[{"subitem_source_identifier":"AA11175464","subitem_source_identifier_type":"NCID"}]},"item_77_subject_9":{"attribute_name":"日本十進分類法","attribute_value_mlt":[{"subitem_subject":"435","subitem_subject_scheme":"NDC"}]},"item_77_version_type_21":{"attribute_name":"著者版フラグ","attribute_value_mlt":[{"subitem_version_resource":"http://purl.org/coar/version/c_970fb48d4fbd8a85","subitem_version_type":"VoR"}]},"item_access_right":{"attribute_name":"アクセス権","attribute_value_mlt":[{"subitem_access_right":"open 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ヒデノリ","creatorNameLang":"ja-Kana"}],"familyNames":[{},{},{}],"givenNames":[{},{},{}],"nameIdentifiers":[{},{}]},{"creatorAffiliations":[{"affiliationNameIdentifiers":[],"affiliationNames":[{"affiliationName":""}]}],"creatorNames":[{"creatorName":"田頭,  博昭","creatorNameLang":"ja"},{"creatorName":"TAGASHIRA, Hiroaki","creatorNameLang":"en"},{"creatorName":"タガシラ, ヒロアキ","creatorNameLang":"ja-Kana"}],"familyNames":[{},{},{}],"givenNames":[{},{},{}],"nameIdentifiers":[{},{}]}]},"item_files":{"attribute_name":"ファイル情報","attribute_type":"file","attribute_value_mlt":[{"accessrole":"open_date","date":[{"dateType":"Available","dateValue":"2016-02-16"}],"displaytype":"detail","filename":"49_toukou02.pdf","filesize":[{"value":"641.6 kB"}],"format":"application/pdf","licensetype":"license_note","mimetype":"application/pdf","url":{"label":"49_toukou02.pdf","objectType":"fulltext","url":"https://muroran-it.repo.nii.ac.jp/record/8302/files/49_toukou02.pdf"},"version_id":"0365df60-64bb-4899-b4f4-c8fef2e66dd9"}]},"item_keyword":{"attribute_name":"キーワード","attribute_value_mlt":[{"subitem_subject":"radio frequency discharge","subitem_subject_language":"en","subitem_subject_scheme":"Other"},{"subitem_subject":"nitrogen gas","subitem_subject_language":"en","subitem_subject_scheme":"Other"},{"subitem_subject":"self-consistent model","subitem_subject_language":"en","subitem_subject_scheme":"Other"},{"subitem_subject":"propagator method","subitem_subject_language":"en","subitem_subject_scheme":"Other"},{"subitem_subject":"computer simulation","subitem_subject_language":"en","subitem_subject_scheme":"Other"}]},"item_language":{"attribute_name":"言語","attribute_value_mlt":[{"subitem_language":"jpn"}]},"item_resource_type":{"attribute_name":"資源タイプ","attribute_value_mlt":[{"resourcetype":"departmental bulletin paper","resourceuri":"http://purl.org/coar/resource_type/c_6501"}]},"item_title":"Propagator法による容量結合方窒素RFプラズマの解析","item_titles":{"attribute_name":"タイトル","attribute_value_mlt":[{"subitem_title":"Propagator法による容量結合方窒素RFプラズマの解析","subitem_title_language":"ja"},{"subitem_title":"Computer simulation of Capacitively Coupled Radio Frequency Plasma in Nitrogen using Propagator Method","subitem_title_language":"en"}]},"item_type_id":"77","owner":"18","path":["173","273"],"pubdate":{"attribute_name":"PubDate","attribute_value":"2007-06-12"},"publish_date":"2007-06-12","publish_status":"0","recid":"8302","relation_version_is_last":true,"title":["Propagator法による容量結合方窒素RFプラズマの解析"],"weko_creator_id":"18","weko_shared_id":-1},"updated":"2023-10-25T05:26:28.326910+00:00"}