{"created":"2023-06-19T10:29:42.303499+00:00","id":9681,"links":{},"metadata":{"_buckets":{"deposit":"383b5fb7-a792-4f2e-a922-63cd8987b0a8"},"_deposit":{"created_by":18,"id":"9681","owners":[18],"pid":{"revision_id":0,"type":"depid","value":"9681"},"status":"published"},"_oai":{"id":"oai:muroran-it.repo.nii.ac.jp:00009681","sets":["41:227"]},"author_link":["54724"],"item_81_date_granted_17":{"attribute_name":"学位授与年月日","attribute_value_mlt":[{"subitem_dategranted":"2018-03-23"}]},"item_81_degree_grantor_10":{"attribute_name":"学位授与機関","attribute_value_mlt":[{"subitem_degreegrantor":[{"subitem_degreegrantor_language":"ja","subitem_degreegrantor_name":"室蘭工業大学"},{"subitem_degreegrantor_language":"en","subitem_degreegrantor_name":"Muroran Institute of Technology"}],"subitem_degreegrantor_identifier":[{"subitem_degreegrantor_identifier_name":"10103","subitem_degreegrantor_identifier_scheme":"kakenhi"}]}]},"item_81_degree_name_11":{"attribute_name":"学位名","attribute_value_mlt":[{"subitem_degreename":"博士（工学）","subitem_degreename_language":"ja"}]},"item_81_description_25":{"attribute_name":"フォーマット","attribute_value_mlt":[{"subitem_description":"application/pdf","subitem_description_type":"Other"}]},"item_81_description_7":{"attribute_name":"抄録","attribute_value_mlt":[{"subitem_description":"コンピュータの性能向上とシミュレーション技法の発達によって，気体放電プラズマの高精度なシミュレーションが可能となり，シミュレーションから得られる化学種の生成量や時空間プロファイルに関する情報が，プラズマ中における化学反応過程の解明ならびにプラズマプロセスの性能の予測に不可欠なものとなりつつある。プラズマシミュレーションでは，プラズマ中の化学種の生成，消失および輸送は連続の式によって表されるため，この式に用いられる反応レート係数および輸送係数に正確な値が必要となる。特に，電子は電界によって容易に加速され，電子と気体分子の衝突によって放電の生成・維持を担う電子やイオンを生成するとともに，電子と気体分子の衝突で生成される活性な解離種は，プラズマ中の化学反応の起点となるため，正確な電子輸送係数と電子衝突反応に係る反応レート係数が要求されている。これらの係数は，電子衝突断面積を用いた電子輸送解析によって導出することができるため，詳細かつ正確な電子衝突断面積セットへの要求がきわめて高まっている。本論文では，プラズマCVD法による薄膜堆積における原料ガスであるテトラメチルシラン[TMS, Si(CH3)4]蒸気とテトラエトキシシラン[TEOS, Si(OC2H5)4]蒸気，水と接した放電プラズマの解析において重要となる水蒸気および基本的なガスであるN2ガスの詳細かつ正確な電子衝突断面積セットを電子スオーム法によって決定し，これらのガス中において電子輸送解析を行った結果について述べている。電子輸送解析においては，現段階で最も定量的に優れたMonte Carlo simulation (MCS)を用い，電子輸送係数を正確に導出することで電子スオーム法によって決定される電子衝突断面積の精度を高めた。断面積セットの詳細さを高め，利用者の要求に応えるため，決定したTMS，TEOS，水蒸気およびN2ガスの断面積セットでは，それぞれ17種類，20種類，12種類および6種類の活性種の生成に関する断面積を考慮した。決定した断面積セットを用いたMCSによって得られた電子ドリフト速度，縦方向拡散係数および実効電離係数の計算値は，実測値を十分に再現することがわかり，決定した断面積セットの妥当性が示された。また，水蒸気中の電子輸送解析では，超弾性衝突を考慮し，100 Td以下における電子ドリフト速度と縦方向拡散係数において，超弾性衝突がわずかに影響を及ぼすことが明らかとなった。N2ガスにおいては，2,500 Td以上の高換算電界において，換算電界の増加に伴って電離係数の実測値が低下する理由を解析し，非弾性衝突後の電子の散乱方向依存性と電離衝突で生成される電子のエネルギー分布が影響する可能性を見出した。","subitem_description_language":"ja","subitem_description_type":"Abstract"},{"subitem_description":"Thanks to the improvement of computers’ performance and the increase of their memory size, computer simulation of discharge plasma, which is used for a wide variety of applications, such as plasma CVD, plasma etching, gas laser, etc., has been performed to estimate generation rate and spatiotemporal variation of the density of chemically active species. The information concerning the generation rate and the density of the active species is indispensable for the prediction of chemical reactions induced in the plasma and the performance of plasma processes. In the plasma simulation, continuity and rate equations, which respectively describe the generation, loss, and transport of charged species, and the generation and loss of chemical species in the plasma, are solved; therefore, accurate transport and rate coefficients must be used in the equations to improve the accuracy of the simulation. Electrons are accelerated easily by an electric field and collide with gas molecules, generating charged and active species, which induce chemical reactions; that is, electrons play an important role in generating and maintaining discharge plasma. Therefore, the accurate electron transport coefficients and rate coefficients are needed for the accurate plasma simulation. Some of those coefficients are measured, but most of the coefficients are often deduced by electron transport analysis using electron collision cross sections. Hence, accurate, reliable, and detailed electron collision cross section sets are required. In this work, accurate, reliable, and detailed cross section sets of tetramethylsilane [TMS, Si(CH3)4], tetraethoxysilane [TEOS, Si(OC2H5)4], and water vapours, and nitrogen gas are estimated by the electron swarm method. The estimated cross section sets of TMS, TEOS, and water vapours, and nitrogen gas include information on generation of 17, 20, 12, and 6 kinds of charged and active species, respectively, making them more detailed. Electron transport coefficients in the gases are deduced by Monte Carlo simulation using the cross section sets to increase accuracy, and the transport coefficients are compared with measured data to confirm the reliability of the cross section sets. The values of electron drift velocity, longitudinal diffusion coefficient, and effective ionization coefficient deduced from the estimated cross section sets are found to reproduce the measured data, confirming the reliability of the estimated cross section sets. In water vapour, superelastic collisions between rotationally excited water molecules and electrons are found to slightly affect the values of electron drift velocity and longitudinal diffusion coefficient below 100 Td. In nitrogen gas, it is found that anisotropic electron scattering after inelastic collisions and the distribution probability of residual energy between scattered and ejected electrons after ionization must be considered to reproduce the measured ionization coefficient above 2,500 Td, where the values of the ionization coefficient reach the maximum and then decrease with increasing a reduced electric field.","subitem_description_language":"en","subitem_description_type":"Abstract"}]},"item_81_dissertation_number_13":{"attribute_name":"学位授与番号","attribute_value_mlt":[{"subitem_dissertationnumber":"甲第412号"}]},"item_81_identifier_registration":{"attribute_name":"ID登録","attribute_value_mlt":[{"subitem_identifier_reg_text":"10.15118/00009633","subitem_identifier_reg_type":"JaLC"}]},"item_81_subject_9":{"attribute_name":"日本十進分類法","attribute_value_mlt":[{"subitem_subject":"549","subitem_subject_scheme":"NDC"}]},"item_81_text_12":{"attribute_name":"学位の種別","attribute_value_mlt":[{"subitem_text_language":"ja","subitem_text_value":"課程博士"}]},"item_81_text_14":{"attribute_name":"報告番号","attribute_value_mlt":[{"subitem_text_language":"ja","subitem_text_value":"甲第412号"}]},"item_81_text_15":{"attribute_name":"学位記番号","attribute_value_mlt":[{"subitem_text_language":"ja","subitem_text_value":"博甲第412号"}]},"item_81_text_16":{"attribute_name":"研究科・専攻","attribute_value_mlt":[{"subitem_text_language":"ja","subitem_text_value":"工学専攻"}]},"item_81_version_type_24":{"attribute_name":"著者版フラグ","attribute_value_mlt":[{"subitem_version_resource":"http://purl.org/coar/version/c_970fb48d4fbd8a85","subitem_version_type":"VoR"}]},"item_access_right":{"attribute_name":"アクセス権","attribute_value_mlt":[{"subitem_access_right":"open access","subitem_access_right_uri":"http://purl.org/coar/access_right/c_abf2"}]},"item_creator":{"attribute_name":"著者","attribute_type":"creator","attribute_value_mlt":[{"creatorAffiliations":[{"affiliationNameIdentifiers":[],"affiliationNames":[{"affiliationName":"","affiliationNameLang":"ja"}]}],"creatorNames":[{"creatorName":"川口, 悟","creatorNameLang":"ja"},{"creatorName":"KAWAGUCHI, Satoru","creatorNameLang":"en"},{"creatorName":"カワグチ, サトル","creatorNameLang":"ja-Kana"}],"familyNames":[{"familyName":"川口","familyNameLang":"ja"},{"familyName":"KAWAGUCHI","familyNameLang":"en"},{"familyName":"カワグチ","familyNameLang":"ja-Kana"}],"givenNames":[{"givenName":"悟","givenNameLang":"ja"},{"givenName":"Satoru","givenNameLang":"en"},{"givenName":"サトル","givenNameLang":"ja-Kana"}],"nameIdentifiers":[{"nameIdentifier":"54724","nameIdentifierScheme":"WEKO"}]}]},"item_files":{"attribute_name":"ファイル情報","attribute_type":"file","attribute_value_mlt":[{"accessrole":"open_date","date":[{"dateType":"Available","dateValue":"2019-06-24"}],"displaytype":"detail","filename":"A412.pdf","filesize":[{"value":"2.8 MB"}],"format":"application/pdf","licensetype":"license_note","mimetype":"application/pdf","url":{"label":"A412","objectType":"fulltext","url":"https://muroran-it.repo.nii.ac.jp/record/9681/files/A412.pdf"},"version_id":"359d97ff-30e0-43c6-9a35-67e4fb26404e"},{"accessrole":"open_date","date":[{"dateType":"Available","dateValue":"2018-06-06"}],"displaytype":"detail","filename":"A412_summary.pdf","filesize":[{"value":"155.6 kB"}],"format":"application/pdf","licensetype":"license_note","mimetype":"application/pdf","url":{"label":"A412_summary","objectType":"abstract","url":"https://muroran-it.repo.nii.ac.jp/record/9681/files/A412_summary.pdf"},"version_id":"18862c16-ab26-4200-bb32-8e532763da51"}]},"item_language":{"attribute_name":"言語","attribute_value_mlt":[{"subitem_language":"jpn"}]},"item_resource_type":{"attribute_name":"資源タイプ","attribute_value_mlt":[{"resourcetype":"doctoral thesis","resourceuri":"http://purl.org/coar/resource_type/c_db06"}]},"item_title":"TMS, TEOS, H2O vapours および N2 の電子衝突断面積と 電子輸送解析","item_titles":{"attribute_name":"タイトル","attribute_value_mlt":[{"subitem_title":"TMS, TEOS, H2O vapours および N2 の電子衝突断面積と 電子輸送解析","subitem_title_language":"ja"}]},"item_type_id":"81","owner":"18","path":["227"],"pubdate":{"attribute_name":"PubDate","attribute_value":"2018-06-06"},"publish_date":"2018-06-06","publish_status":"0","recid":"9681","relation_version_is_last":true,"title":["TMS, TEOS, H2O vapours および N2 の電子衝突断面積と 電子輸送解析"],"weko_creator_id":"18","weko_shared_id":-1},"updated":"2023-11-09T07:41:08.741511+00:00"}