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窒素RFプラズマの発光分光診断
http://hdl.handle.net/10258/1575
http://hdl.handle.net/10258/15752dbf54f6-3527-4876-852d-53f6465421dd
名前 / ファイル | ライセンス | アクション |
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trieejA121_465_2001.pdf (1.9 MB)
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Item type | 学術雑誌論文 / Journal Article.(1) | |||||||||||
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公開日 | 2012-08-28 | |||||||||||
タイトル | ||||||||||||
言語 | ja | |||||||||||
タイトル | 窒素RFプラズマの発光分光診断 | |||||||||||
タイトル | ||||||||||||
言語 | en | |||||||||||
タイトル | Optical Emission Spectroscopic Diagnostics in Nitrogen RF Discharges | |||||||||||
言語 | ||||||||||||
言語 | jpn | |||||||||||
キーワード | ||||||||||||
言語 | ja | |||||||||||
主題Scheme | Other | |||||||||||
主題 | 発光分光診断 | |||||||||||
キーワード | ||||||||||||
言語 | ja | |||||||||||
主題Scheme | Other | |||||||||||
主題 | RFプラズマ | |||||||||||
キーワード | ||||||||||||
言語 | ja | |||||||||||
主題Scheme | Other | |||||||||||
主題 | 正イオン | |||||||||||
キーワード | ||||||||||||
言語 | ja | |||||||||||
主題Scheme | Other | |||||||||||
主題 | 二次電子 | |||||||||||
キーワード | ||||||||||||
言語 | ja | |||||||||||
主題Scheme | Other | |||||||||||
主題 | ダブルレイヤー | |||||||||||
キーワード | ||||||||||||
言語 | ja | |||||||||||
主題Scheme | Other | |||||||||||
主題 | 電離 | |||||||||||
キーワード | ||||||||||||
言語 | ja | |||||||||||
主題Scheme | Other | |||||||||||
主題 | 励起 | |||||||||||
資源タイプ | ||||||||||||
資源タイプ識別子 | http://purl.org/coar/resource_type/c_6501 | |||||||||||
資源タイプ | journal article | |||||||||||
アクセス権 | ||||||||||||
アクセス権 | open access | |||||||||||
アクセス権URI | http://purl.org/coar/access_right/c_abf2 | |||||||||||
著者 |
伊藤, 秀範
× 伊藤, 秀範× 西山, 伸泰× 佐藤, 孝紀
WEKO
9585
× 中尾, 好隆× 田頭, 博昭 |
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室蘭工業大学研究者データベースへのリンク | ||||||||||||
佐藤 孝紀(SATOH Kohki) | ||||||||||||
http://rdsoran.muroran-it.ac.jp/html/100000024_ja.html | ||||||||||||
抄録 | ||||||||||||
内容記述タイプ | Abstract | |||||||||||
内容記述 | The characteristics of RF plasmas as a function of driving frequency f, 0.1-13.56MHz in nitrogen has been observed by optical emission spectroscopic method. The space- and time-resolved profiles of the net excitation rate of molecules and ions have been deduced from spatiotemporally resolved optical emission profiles of their species, i.e. the second positive and the first negative bands. It is found that ionizations due to the secondary electrons from the electrodes by positive ions play an important part in the maintaining mechanism at low frequency as f < 1.5MHz, while a discharge is maintained by bulk ionizations at high frequency as f > 10MHz. The results also show that a discharge at middle frequency as 1.5 < f < 10MHz, is explained from the point of view of the transition of the mechanism which maintains a discharge. It is also shown that the excitation profiles exhibit double layers near the electrodes in nitrogen at 13.56MHz, 60W and the gas pressure p, p > 67Pa. | |||||||||||
言語 | en | |||||||||||
書誌情報 |
ja : 電気学会論文誌. A, 基礎・材料・共通部門誌 巻 121, 号 5, p. 465-470, 発行日 2001 |
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出版者 | ||||||||||||
言語 | ja | |||||||||||
出版者 | 電気学会 | |||||||||||
論文ID(NAID) | ||||||||||||
関連タイプ | isIdenticalTo | |||||||||||
識別子タイプ | NAID | |||||||||||
関連識別子 | 120004681109 | |||||||||||
日本十進分類法 | ||||||||||||
主題Scheme | NDC | |||||||||||
主題 | 427 | |||||||||||
ISSN | ||||||||||||
収録物識別子タイプ | PISSN | |||||||||||
収録物識別子 | 03854205 | |||||||||||
ISSN | ||||||||||||
収録物識別子タイプ | EISSN | |||||||||||
収録物識別子 | 13475533 | |||||||||||
書誌レコードID | ||||||||||||
収録物識別子タイプ | NCID | |||||||||||
収録物識別子 | AN10136312 | |||||||||||
書誌レコードID | ||||||||||||
収録物識別子タイプ | NCID | |||||||||||
収録物識別子 | AA12116187 | |||||||||||
権利 | ||||||||||||
言語 | ja | |||||||||||
権利情報 | Copyright 2001 電気学会 ダウンロードを含むこの著作物の利用は、著作権法の私的使用及び引用の範囲に限り認められます。その範囲外の利用については、電気学会 の承諾が必要です。 | |||||||||||
著者版フラグ | ||||||||||||
出版タイプ | VoR | |||||||||||
出版タイプResource | http://purl.org/coar/version/c_970fb48d4fbd8a85 | |||||||||||
フォーマット | ||||||||||||
内容記述タイプ | Other | |||||||||||
内容記述 | application/pdf |