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He-Neレーザー・エリプソメーターの試作とそのシリコン上薄膜の測定への応用
http://hdl.handle.net/10258/3632
http://hdl.handle.net/10258/363292c05733-b9f8-4291-b7fb-ff86769edbc8
名前 / ファイル | ライセンス | アクション |
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r8-3_813.pdf (508.3 kB)
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Item type | 紀要論文 / Departmental Bulletin Paper(1) | |||||
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公開日 | 2014-07-24 | |||||
タイトル | ||||||
言語 | ja | |||||
タイトル | He-Neレーザー・エリプソメーターの試作とそのシリコン上薄膜の測定への応用 | |||||
タイトル | ||||||
言語 | en | |||||
タイトル | Instrumentation of a He-Ne Gas Laser Ellipsometer and its Application to the Measurements of Thin Films on Silicon | |||||
言語 | ||||||
言語 | jpn | |||||
資源タイプ | ||||||
資源タイプ識別子 | http://purl.org/coar/resource_type/c_6501 | |||||
資源タイプ | departmental bulletin paper | |||||
アクセス権 | ||||||
アクセス権 | open access | |||||
アクセス権URI | http://purl.org/coar/access_right/c_abf2 | |||||
著者 |
森, 真人
× 森, 真人× 金山, 昭佳× 南條, 淳二× 野村, 滋× 原, 進一 |
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書誌情報 |
ja : 室蘭工業大学研究報告. 理工編 en : Memoirs of the Muroran Institute of Technology. Science and engineering 巻 8, 号 3, p. 813-822, 発行日 1976-01-30 |
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出版者 | ||||||
言語 | ja | |||||
出版者 | 室蘭工業大学 | |||||
論文ID(NAID) | ||||||
関連タイプ | isIdenticalTo | |||||
識別子タイプ | NAID | |||||
関連識別子 | 40003627488 | |||||
日本十進分類法 | ||||||
主題Scheme | NDC | |||||
主題 | 541 | |||||
ISSN | ||||||
収録物識別子タイプ | PISSN | |||||
収録物識別子 | 05802415 | |||||
書誌レコードID | ||||||
収録物識別子タイプ | NCID | |||||
収録物識別子 | AN00238225 | |||||
著者版フラグ | ||||||
出版タイプ | VoR | |||||
出版タイプResource | http://purl.org/coar/version/c_970fb48d4fbd8a85 | |||||
フォーマット | ||||||
内容記述タイプ | Other | |||||
内容記述 | application/pdf |