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画像処理法を用いたプラズマ分光診断法の開発と水素RFプラズマへの適用
http://hdl.handle.net/10258/1583
http://hdl.handle.net/10258/1583695b1bb1-5b47-49e5-9674-ad91b7696b8c
名前 / ファイル | ライセンス | アクション |
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trieejC115_475_1995.pdf (1.4 MB)
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Item type | 学術雑誌論文 / Journal Article.(1) | |||||||||||
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公開日 | 2012-08-29 | |||||||||||
タイトル | ||||||||||||
言語 | ja | |||||||||||
タイトル | 画像処理法を用いたプラズマ分光診断法の開発と水素RFプラズマへの適用 | |||||||||||
タイトル | ||||||||||||
言語 | en | |||||||||||
タイトル | Development of Plasma Diagnostics using Image Processing and Optical Diagnostics of RF Plasmas in H_2 | |||||||||||
言語 | ||||||||||||
言語 | jpn | |||||||||||
キーワード | ||||||||||||
言語 | ja | |||||||||||
主題Scheme | Other | |||||||||||
主題 | プラズマプロセス | |||||||||||
キーワード | ||||||||||||
言語 | ja | |||||||||||
主題Scheme | Other | |||||||||||
主題 | 分光診断 | |||||||||||
キーワード | ||||||||||||
言語 | ja | |||||||||||
主題Scheme | Other | |||||||||||
主題 | イメージインテンシファイア | |||||||||||
キーワード | ||||||||||||
言語 | ja | |||||||||||
主題Scheme | Other | |||||||||||
主題 | 時空分解 | |||||||||||
資源タイプ | ||||||||||||
資源タイプ識別子 | http://purl.org/coar/resource_type/c_6501 | |||||||||||
資源タイプ | journal article | |||||||||||
アクセス権 | ||||||||||||
アクセス権 | open access | |||||||||||
アクセス権URI | http://purl.org/coar/access_right/c_abf2 | |||||||||||
著者 |
伊藤, 秀範
× 伊藤, 秀範× 池田, 誠× 武山, 保人× 佐藤, 孝紀
WEKO
9585
× 中尾, 好隆× 田頭, 博昭 |
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室蘭工業大学研究者データベースへのリンク | ||||||||||||
佐藤 孝紀(SATOH Kohki) | ||||||||||||
http://rdsoran.muroran-it.ac.jp/html/100000024_ja.html | ||||||||||||
抄録 | ||||||||||||
内容記述タイプ | Abstract | |||||||||||
内容記述 | A computer-aided spectroscopic system by use of an image processing method has been developed in order to diagnose various processing plasma. This sytem is composed of a monochromator, two image intensifiers, a CCD camera and a computer. This is characterised by the employment of a digital signal processor and spatial filtering treatment of image data for fast image operations. The validity and the significance of this system have been confirmed by the results of the spatiotemporally resolved optical emission diagnostics of plasmas in H_2. The time-resolved spectra have been obtained clearly and the time variation of the profles has been explained from the viewpoint of the self-bias voltage in plasmas. | |||||||||||
言語 | en | |||||||||||
書誌情報 |
ja : 電気学会論文誌. C, 電子・情報・システム部門誌 巻 115, 号 3, p. 475-480, 発行日 1995 |
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出版者 | ||||||||||||
言語 | ja | |||||||||||
出版者 | 電気学会 | |||||||||||
論文ID(NAID) | ||||||||||||
関連タイプ | isIdenticalTo | |||||||||||
識別子タイプ | NAID | |||||||||||
関連識別子 | 10001707154 | |||||||||||
日本十進分類法 | ||||||||||||
主題Scheme | NDC | |||||||||||
主題 | 427 | |||||||||||
ISSN | ||||||||||||
収録物識別子タイプ | PISSN | |||||||||||
収録物識別子 | 03854221 | |||||||||||
書誌レコードID | ||||||||||||
収録物識別子タイプ | NCID | |||||||||||
収録物識別子 | AN10065950 | |||||||||||
権利 | ||||||||||||
言語 | ja | |||||||||||
権利情報 | Copyright 1995 電気学会 ダウンロードを含むこの著作物の利用は、著作権法の私的使用及び引用の範囲に限り認められます。その範囲外の利用については、電気学会 の承諾が必要です。 | |||||||||||
著者版フラグ | ||||||||||||
出版タイプ | VoR | |||||||||||
出版タイプResource | http://purl.org/coar/version/c_970fb48d4fbd8a85 | |||||||||||
フォーマット | ||||||||||||
内容記述タイプ | Other | |||||||||||
内容記述 | application/pdf |