| Item type |
紀要論文 / Departmental Bulletin Paper(1) |
| 公開日 |
2014-03-04 |
| タイトル |
|
|
タイトル |
Surface Photovoltage Monitoring of Heavy Metal Contamination on Silicon During Chemical Cleaning in IC Manufacturing |
|
言語 |
en |
| 言語 |
|
|
言語 |
eng |
| 資源タイプ |
|
|
資源タイプ識別子 |
http://purl.org/coar/resource_type/c_6501 |
|
資源タイプ |
departmental bulletin paper |
| アクセス権 |
|
|
アクセス権 |
open access |
|
アクセス権URI |
http://purl.org/coar/access_right/c_abf2 |
| 著者 |
野村, 滋
遠藤, 敏明
福田, 永
JASTRZEBSKI, Lubek
LAGOWSKI, Jacek
|
| 抄録 |
|
|
内容記述タイプ |
Abstract |
|
内容記述 |
The principles and application examples of recently refined，computerized surface photovoltage (SPV) method are described. The SPV method was used to optimize cleaning efficiency and to monitor 'in-line' heavy metal contamination and charge during critical processing steps for Statistical Process Control (SPC). Examples of the optimization of various cleaning steps，effects of the purity of virgin and reused chemicals， and the surface topology on cleaning efficiency will be given together with examples of SPC monitoring of real problems in processing lines. Cleanliness of incoming chemicals is not always a limiting factor and often is not related to the cleanliness of chemicals at the point of use (in the cleaning station). This new method is capable of waferscale，non- contact mapping of metal contaminants in the bulk and on the surface with sensitivities as high as 10¹⁰atoms cm-³. |
|
言語 |
en |
| 書誌情報 |
ja : 室蘭工業大学研究報告. 理工編
en : Memoirs of the Muroran Institute of Technology. Science and engineering
巻 44,
p. 1-14,
発行日 1994-11-25
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| 出版者 |
|
|
出版者 |
室蘭工業大学 |
|
言語 |
ja |
| 論文ID（NAID） |
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|
関連タイプ |
isIdenticalTo |
|
|
識別子タイプ |
NAID |
|
|
関連識別子 |
110000351871 |
| 日本十進分類法 |
|
|
主題Scheme |
NDC |
|
主題 |
549.8 |
| ISSN |
|
|
収録物識別子タイプ |
PISSN |
|
収録物識別子 |
05802415 |
| 書誌レコードID |
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|
収録物識別子タイプ |
NCID |
|
収録物識別子 |
AN00238225 |
| 著者版フラグ |
|
|
出版タイプ |
VoR |
|
出版タイプResource |
http://purl.org/coar/version/c_970fb48d4fbd8a85 |
| フォーマット |
|
|
内容記述タイプ |
Other |
|
内容記述 |
application/pdf |
kiyo44_rikou_pp1-14.pdf (1.3 MB)
