Behavior of electrons and N2+ ions in radio frequency(RF) discharge in nitrogen is simulated by self-consistent model using Propagator method coupled with Poisson's equation and external circuit equations. The spatio-temporal variations of electric field in a gap, mean energies of the electrons and ions, excitation rate etc, are obtained. It is seen that in the spatio-temporal variation of excitation rate to C3.PI.u state, large peaks due to sheath appear at the phase of maximum voltage of RF power, and small peaks next to the large peaks appear at the same phase. This profile agrees qualitatively with the density profile of C3.PI.u state molecules obtained from emission spectroscopy. It is found from this simulation that the small peaks are due to double layers.
Propagator法による容量結合方窒素RFプラズマの解析
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