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Propagator法による容量結合方窒素RFプラズマの解析
http://hdl.handle.net/10258/157
http://hdl.handle.net/10258/1577aeaecc1-5a1b-46c8-ac46-b39dcea24fe9
名前 / ファイル | ライセンス | アクション |
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49_toukou02.pdf (641.6 kB)
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Item type | 紀要論文 / Departmental Bulletin Paper(1) | |||||||||||
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公開日 | 2007-06-12 | |||||||||||
タイトル | ||||||||||||
言語 | ja | |||||||||||
タイトル | Propagator法による容量結合方窒素RFプラズマの解析 | |||||||||||
タイトル | ||||||||||||
言語 | en | |||||||||||
タイトル | Computer simulation of Capacitively Coupled Radio Frequency Plasma in Nitrogen using Propagator Method | |||||||||||
言語 | ||||||||||||
言語 | jpn | |||||||||||
キーワード | ||||||||||||
言語 | en | |||||||||||
主題Scheme | Other | |||||||||||
主題 | radio frequency discharge | |||||||||||
キーワード | ||||||||||||
言語 | en | |||||||||||
主題Scheme | Other | |||||||||||
主題 | nitrogen gas | |||||||||||
キーワード | ||||||||||||
言語 | en | |||||||||||
主題Scheme | Other | |||||||||||
主題 | self-consistent model | |||||||||||
キーワード | ||||||||||||
言語 | en | |||||||||||
主題Scheme | Other | |||||||||||
主題 | propagator method | |||||||||||
キーワード | ||||||||||||
言語 | en | |||||||||||
主題Scheme | Other | |||||||||||
主題 | computer simulation | |||||||||||
資源タイプ | ||||||||||||
資源タイプ識別子 | http://purl.org/coar/resource_type/c_6501 | |||||||||||
資源タイプ | departmental bulletin paper | |||||||||||
アクセス権 | ||||||||||||
アクセス権 | open access | |||||||||||
アクセス権URI | http://purl.org/coar/access_right/c_abf2 | |||||||||||
著者 |
佐藤, 孝紀
× 佐藤, 孝紀
WEKO
9585
× 伊藤, 秀範× 田頭, 博昭 |
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室蘭工業大学研究者データベースへのリンク | ||||||||||||
佐藤 孝紀(SATOH Kohki) | ||||||||||||
http://rdsoran.muroran-it.ac.jp/html/100000024_ja.html | ||||||||||||
抄録 | ||||||||||||
内容記述タイプ | Abstract | |||||||||||
内容記述 | Behavior of electrons and N2+ ions in radio frequency(RF) discharge in nitrogen is simulated by self-consistent model using Propagator method coupled with Poisson's equation and external circuit equations. The spatio-temporal variations of electric field in a gap, mean energies of the electrons and ions, excitation rate etc, are obtained. It is seen that in the spatio-temporal variation of excitation rate to C3.PI.u state, large peaks due to sheath appear at the phase of maximum voltage of RF power, and small peaks next to the large peaks appear at the same phase. This profile agrees qualitatively with the density profile of C3.PI.u state molecules obtained from emission spectroscopy. It is found from this simulation that the small peaks are due to double layers. | |||||||||||
言語 | en | |||||||||||
書誌情報 |
ja : 室蘭工業大学紀要 en : Memoirs of the Muroran Institute of Technology 巻 49, p. 87-92, 発行日 1999-11-30 |
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注記 | ||||||||||||
内容記述タイプ | Other | |||||||||||
内容記述 | 投稿論文 | |||||||||||
言語 | ja | |||||||||||
出版者 | ||||||||||||
言語 | ja | |||||||||||
出版者 | 室蘭工業大学 | |||||||||||
論文ID(NAID) | ||||||||||||
関連タイプ | isIdenticalTo | |||||||||||
識別子タイプ | NAID | |||||||||||
関連識別子 | 110000076530 | |||||||||||
日本十進分類法 | ||||||||||||
主題Scheme | NDC | |||||||||||
主題 | 435 | |||||||||||
ISSN | ||||||||||||
収録物識別子タイプ | PISSN | |||||||||||
収録物識別子 | 13442708 | |||||||||||
書誌レコードID | ||||||||||||
収録物識別子タイプ | NCID | |||||||||||
収録物識別子 | AA11175464 | |||||||||||
権利 | ||||||||||||
言語 | ja | |||||||||||
権利情報 | © 1999 室蘭工業大学 | |||||||||||
著者版フラグ | ||||||||||||
出版タイプ | VoR | |||||||||||
出版タイプResource | http://purl.org/coar/version/c_970fb48d4fbd8a85 | |||||||||||
フォーマット | ||||||||||||
内容記述タイプ | Other | |||||||||||
内容記述 | application/pdf |